Improving performance of piezoelectric energy harvester under electrostatic actuation using cavity

This study aims to investigate the effect of cavity on electric energy harvesting from cantilever beam vibrations under electrostatic actuation. Electrostatic actuation is created by a layer of radioisotope materials that is placed on the opposite side of the beam emitting electrons. When the beam is charged, the electrostatic force is generated between the beam and the opposite plate and pulls the beam towards itself. After the beam strikes the radioisotope, it is electrically discharged and then released. The piezoelectric layer converts the released microbeam vibration into electricity. The equations of motion coupled with the electrical effects of the piezoelectric layer are extracted using Hamilton's principle and Gauss's law. The equations are discretized by Galerkin method. The exact mode shape of the cantilever beam with the piezoelectric layer is employed as the comparison function. By identifying the relations governing the system, the output voltage and consequently the amount of harvested electrical energy are obtained using various parameters such as thickness and position of the cavity and system electrical resistance. The results indicates that creating cavity has a significant effect on the energy harvesting.