On the vibration and energy harvesting of the piezoelectric MEMS/NEMS via nonlocal strain gradient theory

The possibility of energy harvesting as well as vibration of a three-layered beam consisting of two piezoelectric layers and one core layer made of nonpiezoelectric material is investigated using nonlocal strain gradient theory. The three-layered nanobeam is resting on an elastic foundation. Hamilton's principle is used to derive governing equations and associated boundary conditions. The generalized differential quadrature method (GDQM) was used to discretize the equations, and the Newmark beta method was used to solve them. The size-dependency of the elastic foundation is considered using two-phase elasticity. The equations, as well as the solution procedure, are validated utilizing some compassion studies. This work can be a basis for future studies on energy harvesting of small scales.