Piezoelectric 6-dimensional accelerometer cross coupling compensation algorithm based on two-stage calibration

In order to improve the measurement accuracy of the 6-dimensional accelerometer, the cross coupling compensation method of the accelerometer needs to be studied. In this paper, the non-linear error caused by cross coupling of piezoelectric sixdimensional accelerometer is compensated online. The cross coupling filter is obtained by analyzing the cross coupling principle of a piezoelectric six-dimensional accelerometer. Linear and non-linear fitting methods are designed. A two-level calibration hybrid compensation algorithm is proposed. An experimental prototype of a piezoelectric six-dimensional accelerometer is fabricated. Calibration and test experiments of accelerometer were carried out. The measured results show that the average nonlinearity of the proposed algorithm is 2.2628% lower than that of the least square method, the solution time is 0.019382 seconds, and the proposed algorithm can realize the real-time measurement in six dimensions while improving the measurement accuracy. The proposed algorithm combines real-time and high precision. The research results provide theoretical and technical support for the calibration method and online compensation technology of the 6-dimensional accelerometer.