The influence of nonlinear damping on the response of a piezoelectric cantilever sensor in a symmetric or asymmetric configuration

Giuseppe Habib , Emanuel Fainshtein , Kai-Dietrich Wolf , Oded Gottlieb

Abstract

We investigate the influence of nonlinear viscoelastic damping on the response of a cantilever sensor covered by piezoelectric layers in a symmetric or asymmetric configuration. We formulate an initial-boundary-value problem which consistently incorporates both geometric and material nonlinearities including the effect of viscoelastic damping which cannot be ignored for micro- and nano-mechanical sensor operation in a vacuum environment. We employ an asymptotic multiplescales methodology to yield the system nonlinear frequency response near its primary resonance and employ a model-based estimation procedure to deduce the system damping backone curve from controlled experiments in vacuum. We discuss the effect of nonlinear damping on sensor applications for scanning probe microscopy.

Key Words

nonlinear viscoelastic damping; piezoelectric cantilever sensor; symmetric/asymmetric configuration

Address

(1) Giuseppe Habib — Department of Applied Mechanics, Budapest University of Technology and Economics, Budapest, Hungary
(2) Emanuel Fainshtein, Oded Gottlieb — Department of Mechanical Engineering, Technion - Israel Institute of Technology, Haifa, Israel
(3) Kai-Dietrich Wolf — Institute for Security Systems, University of Wuppertal, Velbert, Germany.

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