Double displacement coupled forced response for electromechanical integrated electrostatic harmonic drive

In this paper, the double displacement coupled statics and dynamics of the electromechanical integrated electrostatic harmonic drive are developed. The linearization of the nonlinear dynamic equations is completed. Based on natural frequency and mode function, the double displacement coupled forced response of the drive system to voltage excitation are obtained. Changes of the forced response along with the system parameters are investigated. The voltage excitation can cause the radial and tangent coupled forced responses of the flexible ring. The flexible ring radius, ring thickness and clearance between the ring and stator have obvious influences on the double displacement coupled forced responses.