Protective systems for high-technology facilities against microvibration and earthquake

Microvibration of high technology facilities, such as semiconductor plants and facilities with high precision equipments, due to nearby road and rail traffic has attracted considerable attention recently. In this paper, a preliminary study is conducted for the possible use of various protective systems and their performance for the reduction of microvibration. Simulation results indicate that passive base isolation systems, hybrid base isolation systems, passive floor isolation systems, and hybrid floor isolation systems are quite effective and practical. In particular, the performances of hybrid floor isolation systems are remarkable. Further, passive energy dissipation systems are not effective for the reduction of microvibration. Finally, the protections against both microvibration and earthquake are also investigated and presented.